Amtech Systems Books 20th Wafer Cleaning System for SiC Applications

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Amtech Systems, Inc., a manufacturer of capital equipment, including thermal processing, wafer polishing, cleaning and related consumables and services used in fabricating semiconductor devices, such as silicon carbide (SiC) silicon power, and electronic assemblies with focus on enabling technologies for electric vehicles (EV) and clean technology (CleanTech) applications, announced the booking of the 20th new OnTrak double-sided wafer scrubber system sold into SiC manufacturing applications.

This booking came from an existing Entrepix OnTrak customer in North America and will ship in the second half of fiscal 2023. Previous SiC related wafer scrubbing system orders came from several customers in Europe, Asia and North America, with the largest install base in Europe and North America respectively. The new OnTrak double-sided scrubber is ideally suited for compound semiconductor applications with configurations for 100-200mm wafers and accommodation for even smaller wafers with custom designed carriers.

“Entrepix was an early mover into the SiC market. Even before the development of the new OnTrak double-sided wafer scrubber, they shipped many refurbished wafer cleaning systems into these fabs,” said Michael Whang, CEO of Amtech Systems. “The booking of the 20th new OnTrak double-sided scrubber for use in Silicon Carbide processing shows the strength of Entrepix’s position this important market segment,” added Whang.