Onto Innovation Acquires Inspectrology, Adds Overlay Metrology Capability
January 11, 2021 | Onto Innovation Inc.Estimated reading time: 2 minutes

Onto Innovation Inc. has acquired Inspectrology, LLC. Headquartered in Sudbury, Massachusetts, USA, Inspectrology is a leading supplier of overlay metrology for controlling lithography and etch processes in the compound semiconductor market.
“This is a nice strategic fit for Onto Innovation’s portfolio of solutions for the high growth specialty and advanced packaging segment. We see revenue synergies by leveraging our broader access to global markets, especially in Asia, where Onto Innovation has built a broad infrastructure to support our leading position in inspection for this segment. In addition, we see revenue synergies when combined with Onto Innovation’s inspection and software technologies. By combining these technologies, we will offer a more comprehensive process control solution for the lithography cell in the rapidly expanding compound semiconductor market,” said Mike Plisinski, Onto Innovation’s chief executive officer.
Dr. Ju Jin, vice president and general manager of Onto Innovation’s inspection business said, “We see several growth drivers for the compound semiconductor and specialty semiconductor markets in 2021 and beyond. The rapidly expanding 5G wireless technology, spanning from smartphones and IoT to network equipment and base stations, is increasing the demand for compound semiconductor chips such as power amplifiers, RF filters, and mmWave cells. In addition, hybrid and electric vehicles, chargers, photovoltaic and wind power generators are driving the fast adoption of compound semiconductor power devices.
“Based on industry forecasts, the gallium nitride and silicon carbide power device market is forecasted to grow at a 25% CAGR from 2020 to 2025. By leveraging our advanced process control software (APC) and the Inspectrology systems we will be able to directly improve the overlay performance and yield for the lithography cells in this rapidly growing market.”
Paul Knutrud, Inspectrology’s chief financial officer and vice president said, “We are joining Onto Innovation based on the strong cultural fit and synergies between our customers and technologies. As a leading supplier for overlay and CD metrology systems to the compound semiconductor, RF, MEMS, and LED markets, the Inspectrology and the Onto teams are a perfect fit. Onto Innovation is providing inspection and software solutions to our same customers, and together, we will offer a more comprehensive solution for process control. We will now be able to leverage Onto Innovation’s R&D resources and larger customer support organization to better serve our customers.”
The experienced Inspectrology leadership team has supplied optical metrology overlay technology to these customers since 1983. The purchase price represents 1.4x Inspectrology’s 2020 revenue of approximately $20 million. The acquisition and associated transaction expenses are being funded from Onto Innovation’s cash on hand. Other terms of transaction were not disclosed.
Suggested Items
Driving Innovation: Traceability in PCB Production
05/29/2025 | Kurt Palmer -- Column: Driving InnovationTraceability across the entire printed circuit board production process is an increasingly important topic among established manufacturers and companies considering new PCB facilities. The reasons are apparent: Automatic loading of part programs, connection with MES systems and collection of production data, and compliance with Industry 4.0 requirements
ClassOne Technology, IBM Research Jointly Developing Non-NMP Solvent Processing for Semiconductor Manufacturing
05/26/2025 | ClassOne TechnologyClassOne Technology, a leading global provider of advanced electroplating and wet processing tools for microelectronics manufacturing, announced it has signed a joint development agreement with IBM Research focused on wet processing for advanced packaging.
KLA Invests in Operations in Wales with the Opening of a $138 Million R&D and Manufacturing Facility
05/23/2025 | PRNewswireKLA Corporation, a global leader in semiconductor process control and process-enabling technology, announced the opening of its new $138 million research and development (R&D) and manufacturing center in Newport, Wales, U.K., continuing the company's history of regional investment. SPTS, KLA's Wales-based product division, has been leading semiconductor equipment innovation in Wales since 1984, winning multiple Queen's Awards for excellence in R&D and export, and attracting strong technical talent to the region.
Pioneering Energy-Efficient AI with Innovative Ferroelectric Technology
05/22/2025 | FraunhoferAs artificial intelligence (AI) becomes increasingly integrated into sectors such as healthcare, autonomous vehicles and smart cities, traditional computing architectures face significant limitations in processing speed and energy efficiency
Trouble in Your Tank: Yield Improvement and Reliability
05/22/2025 | Michael Carano -- Column: Trouble in Your TankThere’s a simple rule of business in manufacturing: “It is all about yields.” Higher yields for your products allow for increased profits and satisfied customers. When there are lower yields, overall cost to manufacture increases, and the additional time and strain on the factory floor affect the entire operation. Lower yields are often the result of “process drift,” when critical process parameters and specialized plating additives fall outside their acceptable ranges.