KLA Launches Revolutionary X-Ray Metrology System
December 8, 2022 | KLAEstimated reading time: 2 minutes
KLA Corporation announced the launch of the revolutionary Axion® T2000 X-ray metrology system for advanced memory chip manufacturers. Fabrication of 3D NAND and DRAM chips involves precise formation of extremely tall structures with deep, narrow holes and trenches, and other intricate architectural shapes – all requiring control at the nanoscale level. The Axion T2000 features patented technologies that power its ability to measure high aspect ratio device features with an unprecedented combination of resolution, accuracy, precision and speed. By discovering the small shape anomalies that can impact memory chip performance, the Axion T2000 helps ensure successful production of the memory chips used in applications such as 5G, artificial intelligence (AI), data centers and edge computing.
KLA’s new Axion® T2000 X-ray metrology system identifies subtle 3D shape variations that can affect memory device functionality or performance.
"Our new Axion T2000 X-ray metrology system is a game changer for inline process control during fabrication of advanced 3D NAND and DRAM devices," said Ahmad Khan, president of the Semiconductor Process Control business unit at KLA. "Using transmissive X-ray technology, the Axion T2000 quickly generates a complete 3D visualization of high aspect ratio structures on the order of 100:1 or greater. From the top to the very bottom of these extreme vertical features, Axion data facilitates tight control of critical parameters, such as width, shape and tilt. Moreover, by measuring inline, the Axion reduces the cycle time required to solve critical yield and reliability issues during high volume production of memory chips."
The Axion T2000 is a CD-SAXS (critical-dimension small angle X-ray scattering) system, leveraging industry-unique X-ray technologies to produce high-resolution measurements of critical dimensions and 3D shapes of memory device features. A high flux source provides X-rays that transmit through the entire vertical memory structure, regardless of how tall it is today or will be in the future, enabling measurement of complex device shapes. A stage with industry-leading dynamic range helps to obtain diffraction images at multiple angles to render rich 3D geometrical information. Novel AcuShape® algorithms facilitate measurement of many critical device parameters and extraction of subtle variations that can affect final memory chip functionality. With these innovations, the Axion T2000 non-destructively produces the dimensional metrology data needed to help memory manufacturers optimize, monitor and control key process steps inline.
With multiple systems in operation at leading memory manufacturers, the Axion T2000 joins KLA's family of advanced metrology systems in providing precise measurement of complex parameters for 3D NAND and DRAM manufacturers. Covering the full range of metrology applications from early R&D to volume production, KLA's comprehensive metrology portfolio produces information that drives faster ramp, improved device quality, and higher production yield. To maintain high performance and productivity, the Axion T2000 is backed by KLA's global comprehensive service network.
Testimonial
"Advertising in PCB007 Magazine has been a great way to showcase our bare board testers to the right audience. The I-Connect007 team makes the process smooth and professional. We’re proud to be featured in such a trusted publication."
Klaus Koziol - atgSuggested Items
Sensors: The Invisible Force Behind Modern Convenience and Safety
10/24/2025 | Sanjeev Mane, Brooks AutomationSensors and sensor technology are fundamental components of modern life that drive innovation across various electronics and devices. From smartphones to industrial machinery, these small but powerful tools enable seamless interaction with the environment, ensuring efficiency and safety. This article serves as an introduction and overview of sensor technology, highlighting its significance in modern applications and its growing importance in the market as we embrace smarter, more connected systems.
Technica USA Partners with Creative Electron
10/22/2025 | Technica USATechnica USA is proud to announce the partnership with Creative Electron Inc. located in San Marcos, CA.
MES Software Tools Need Thoughtful Integration
10/21/2025 | Nolan Johnson, SMT007 MagazineThe Global Electronics Association recently published a survey report on the state of EMS production software. This project, led by Thiago Guimaraes, director of industry intelligence, connects the dots across the global electronics value chain to uncover practical insights that individual companies might not have seen on their own. In this interview, Thiago discusses the whys and hows of this report.
Light-curable Solutions for Reliable Electronics in Space Applications
10/15/2025 | Virginia Hogan, DymaxDesigning electronics for space environments, particularly those in low Earth orbit (LEO), requires careful consideration of materials that can withstand extreme conditions while supporting long-term reliability. Engineers designing satellite systems, aerospace instrumentation, and high-altitude platforms face a familiar set of challenges: contamination control, mechanical stress, thermal cycling, and manufacturability.
Analog Devices Launches ADI Power Studio™ and New Web-Based Tools
10/14/2025 | Analog Devices, Inc.Analog Devices, Inc., a global semiconductor leader, announced the launch of ADI Power Studio, a comprehensive family of products that offers advanced modeling, component recommendations and efficiency analysis with simulation. In addition, ADI is introducing early versions of two new web-based tools with a modernized user experience under the Power Studio umbrella: