Axcelis Announces Successful Purion XEmax Eval Closure at Leading Semiconductor Foundry

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Axcelis Technologies, Inc., a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced the successful Purion XEmax™ high energy implanter evaluation closure at a leading foundry. The system will be used for the production of Power Management Integrated Circuits (PMIC).

President and CEO Russell Low commented, "We're excited to be a part of this important, emerging market and the opportunity to provide the most advanced high energy ion implant technology to chipmakers to support their next generation device development. The successful evaluation closure highlights growing customer requirements for even higher energy implant recipes on advanced PMIC devices, which only the Purion XEmax provides. The system features a dual LINAC design with patented Boost Technology™ for the industry's highest energies up to 15 MeV."

Power Management Integrated Circuits (PMICs) are highly specialized semiconductors that function as the central nervous system for power in modern electronics. They consolidate multiple power control functions—such as voltage regulation, battery charging, and thermal management—into a single chip, driving efficiency and optimizing battery life in everything from smartphones to electric vehicles.

The Purion XE Series:

Our Purion XE™ Series of ion implanters have rapidly earned a reputation as the industry standard for today's demanding high energy recipes. Their unique RF Linear Accelerator (LINAC) technology offers higher reliability, a wider energy range and greater productivity than competing platforms, with superior metals contamination control. The Purion High Energy Series includes a variety of implanters allowing customers to select the optimal energy level for their application: the industry leading Purion XE; the Purion EXE™ for enhanced productivity; the Purion VXE™ for high volume and higher energy applications; the Purion XE Power Series for power devices; and, the Purion XEmax with patented Boost™ technology for metals reduction and the ultra-high energies required for next generation devices.