Shows Promise for Next-gen Semiconductor Production
December 4, 2015 | NISTEstimated reading time: 4 minutes
The method also benefits from a little advance intelligence--the as-designed arrangement of circuit lines on a chip, down to the size of individual features. Knowing what is expected to be the result of the complex chip-making process sets up a classic matchup of theory vs. experiment.
The NIST researchers can use standard equations to simulate light scattering from an ideal, defect-free pattern and, in fact, any variation thereof. Using wave analysis software they developed, the team has assembled an indexed library of light-scattering reference models. So once a specimen is scanned, the team relies on computers to compare their real-world data to models and to find close matches.
From there, succeeding rounds of analysis homes in on the remaining differences, reducing them until the only ones that remain are due to variations in geometry such as irregularities in the height, width, or shape of a line.
Measurement results achieved with the NIST approach might be said to cast light itself in an entirely new light. Their new study, the researchers say, shows that once disregarded scattered light "contains a wealth of accessible optical information."
Next steps include extending the technique to even shorter wavelengths of light, down to ultraviolet, or 193 nanometers. The aim is to accurately measure features as small as 5 nanometers.
This work is part of a larger NIST effort to supply measurement tools that enable the semiconductor industry to continue doubling the number of devices on a chip about every two years and to help other industries make products with nanoscale features. Recently, NIST and Intel researchers reported using an X-ray technique to accurately measure features on a silicon chip to within fractions of a nanometer.
Page 2 of 2Suggested Items
Real Time with… IPC APEX EXPO 2024: Automation in North American PCB Shops
05/17/2024 | Real Time with...IPC APEX EXPOBenmayor Group has entered the North American market's automation landscape with their Technosystem division. In this interview, Eduardo Benmayor highlights this underinvestment and current efforts to catch up and address challenges related to strategic planning. Eduardo shares Technosystem's automation journey, from simple equipment to robotic arms, stressing the importance of machine communication and data analysis. He also offers advice on implementing automation in older facilities.
Using AI to Redefine Productivity
05/15/2024 | Nolan Johnson, SMT007 MagazinePlato Systems, a machine perception company spun out of Stanford University, employs AI and video data to analyze and optimize the human component in manufacturing. Initially focused on semiconductors, Plato Systems has expanded into EMS manufacturing. Co-founder and CEO Amin Arbabian, along with product advisor Anders Holden and head of growth Luis Vidal, discuss their approach to changeover optimization and its impact on productivity in the industry. They’ve also included customer Raj Vora in the conversation.
Real Time with… IPC APEX EXPO 2024: Manufacturing Intelligence from the Factory Floor
05/15/2024 | Real Time with...IPC APEX EXPONolan Johnson and Ranjan Chatterjee, Vice President of Smart Factory Business Units at PDF Solutions, discuss the background of Cimetrix and PDF Solutions. They explore the analytics tools provided by PDF Solutions, the merging of semiconductor and electronics manufacturing, and data handling in these industries. They also discuss different product lines, standards, packaging technologies, data usage, and integration with ERP systems
Nolan’s Notes: Coming to Terms With AI
05/07/2024 | Nolan Johnson -- Column: Nolan's NotesHow fast do things move in the world of data analytics? Here’s an example. We’ve been planning this issue on artificial intelligence for the past few months, and, in fact, I had already written this column about a month ago. Then I went to IPC APEX EXPO and upended it all. I originally had compared AI to drag racing in that (CPU) horsepower and new (data) vehicles have steadily delivered higher performance competition. That seemed pretty accurate given how generative AI models dominated the popular media with amazing results—and sometimes spectacular crashes.
RTX's Advanced Ground System for Space-based Missile Warning Now Operational
05/06/2024 | RTXAn advanced ground system for space-based missile warning developed by Raytheon, an RTX business, is now operational at the U.S. Space Force's Overhead Persistent Infrared Battlespace Awareness Center (OBAC).