-
- News
- Books
Featured Books
- smt007 Magazine
Latest Issues
Current IssueComing to Terms With AI
In this issue, we examine the profound effect artificial intelligence and machine learning are having on manufacturing and business processes. We follow technology, innovation, and money as automation becomes the new key indicator of growth in our industry.
Box Build
One trend is to add box build and final assembly to your product offering. In this issue, we explore the opportunities and risks of adding system assembly to your service portfolio.
IPC APEX EXPO 2024 Pre-show
This month’s issue devotes its pages to a comprehensive preview of the IPC APEX EXPO 2024 event. Whether your role is technical or business, if you're new-to-the-industry or seasoned veteran, you'll find value throughout this program.
- Articles
- Columns
Search Console
- Links
- Events
||| MENU - smt007 Magazine
Tegal, STMicroelectronics Team to Develop New Etch Processes
December 10, 2002 |Estimated reading time: 1 minute
Petaluma, Calif. -- Tegal Corp. has completed the first phase of a joint development project with STMicroelectronics.
The completed portion of the project successfully demonstrated process leadership in Cobalt Silicide (CoSi) gate etch and ferroelectric material etch development. The second and final phase of the project, which is currently underway, is targeted at developing additional CoSi and ferroelectric etch processes for new IC requirements.
Expected to be completed by the end of this year, phase two is also targeted at the development of other etch processes for hard-to-etch materials, an area in which Tegal is an industry leader.
In addition to the joint development project, STMicroelectronics has purchased Tegal's 6500-2RS system for use in process research and development at the company's facility in Catania, Sicily. Tegal's 6500 Series systems have demonstrated effectiveness in addressing the challenges of etching new materials in a production environment for more than 10 years.
Tegal Corp. is a leading designer and manufacturer of plasma etch systems used in the production of integrated circuits (ICs), MEMS, opto-telecom devices and other related microelectronics devices. For more information, visit www.tegal.com.
STMicroelectronics, the world's third largest independent semiconductor company, is a global leader in developing and delivering semiconductor solutions across the spectrum of microelectronics applications.